Can X‐ray spectrum imaging replace backscattered electrons for compositional contrast in the scanning electron microscope?
Identifieur interne : 000501 ( Main/Exploration ); précédent : 000500; suivant : 000502Can X‐ray spectrum imaging replace backscattered electrons for compositional contrast in the scanning electron microscope?
Auteurs : Dale E. Newbury [États-Unis] ; Nicholas W. M. Ritchie [États-Unis]Source :
- Scanning [ 0161-0457 ] ; 2011-05.
English descriptors
- KwdEn :
Abstract
The high throughput of the silicon drift detector energy dispersive X‐ray spectrometer (SDD‐EDS) enables X‐ray spectrum imaging (XSI) in the scanning electron microscope to be performed in frame times of 10–100 s, the typical time needed to record a high‐quality backscattered electron (BSE) image. These short‐duration XSIs can reveal all elements, except H, He, and Li, present as major constituents, defined as 0.1 mass fraction (10 wt%) or higher, as well as minor constituents in the range 0.01–0.1 mass fraction, depending on the particular composition and possible interferences. Although BSEs have a greater abundance by a factor of 100 compared with characteristic X‐rays, the strong compositional contrast in element‐specific X‐ray maps enables XSI mapping to compete with BSE imaging to reveal compositional features. Differences in the fraction of the interaction volume sampled by the BSE and X‐ray signals lead to more delocalization of the X‐ray signal at abrupt compositional boundaries, resulting in poorer spatial resolution. Improved resolution in X‐ray elemental maps occurs for the case of a small feature composed of intermediate to high atomic number elements embedded in a matrix of lower atomic number elements. XSI imaging strongly complements BSE imaging, and the SDD‐EDS technology enables an efficient combined BSE‐XSI measurement strategy that maximizes the compositional information. If 10 s or more are available for the measurement of an area of interest, the analyst should always record the combined BSE‐XSI information to gain the advantages of both measures of compositional contrast. SCANNING 33: 174–192, 2011. © 2011 Wiley Periodicals, Inc.
Url:
DOI: 10.1002/sca.20244
Affiliations:
Links toward previous steps (curation, corpus...)
- to stream Istex, to step Corpus: 000094
- to stream Istex, to step Curation: 000092
- to stream Istex, to step Checkpoint: 000158
- to stream Main, to step Merge: 000507
- to stream Main, to step Curation: 000501
Le document en format XML
<record><TEI wicri:istexFullTextTei="biblStruct"><teiHeader><fileDesc><titleStmt><title xml:lang="en">Can X‐ray spectrum imaging replace backscattered electrons for compositional contrast in the scanning electron microscope?</title><author><name sortKey="Newbury, Dale E" sort="Newbury, Dale E" uniqKey="Newbury D" first="Dale E." last="Newbury">Dale E. Newbury</name></author><author><name sortKey="Ritchie, Nicholas W M" sort="Ritchie, Nicholas W M" uniqKey="Ritchie N" first="Nicholas W. M." last="Ritchie">Nicholas W. M. Ritchie</name></author></titleStmt><publicationStmt><idno type="wicri:source">ISTEX</idno><idno type="RBID">ISTEX:8165BD5DD8C0272779B8783E37827F9A453DE743</idno><date when="2011" year="2011">2011</date><idno type="doi">10.1002/sca.20244</idno><idno type="url">https://api.istex.fr/document/8165BD5DD8C0272779B8783E37827F9A453DE743/fulltext/pdf</idno><idno type="wicri:Area/Istex/Corpus">000094</idno><idno type="wicri:Area/Istex/Curation">000092</idno><idno type="wicri:Area/Istex/Checkpoint">000158</idno><idno type="wicri:doubleKey">0161-0457:2011:Newbury D:can:x:ray</idno><idno type="wicri:Area/Main/Merge">000507</idno><idno type="wicri:Area/Main/Curation">000501</idno><idno type="wicri:Area/Main/Exploration">000501</idno></publicationStmt><sourceDesc><biblStruct><analytic><title level="a" type="main" xml:lang="en">Can X‐ray spectrum imaging replace backscattered electrons for compositional contrast in the scanning electron microscope?</title><author><name sortKey="Newbury, Dale E" sort="Newbury, Dale E" uniqKey="Newbury D" first="Dale E." last="Newbury">Dale E. Newbury</name><affiliation wicri:level="2"><country xml:lang="fr">États-Unis</country><placeName><region type="state">Maryland</region></placeName><wicri:cityArea>National Institute of Standards and Technology, Gaithersburg</wicri:cityArea></affiliation></author><author><name sortKey="Ritchie, Nicholas W M" sort="Ritchie, Nicholas W M" uniqKey="Ritchie N" first="Nicholas W. M." last="Ritchie">Nicholas W. M. Ritchie</name><affiliation wicri:level="2"><country xml:lang="fr">États-Unis</country><placeName><region type="state">Maryland</region></placeName><wicri:cityArea>National Institute of Standards and Technology, Gaithersburg</wicri:cityArea></affiliation></author></analytic><monogr></monogr><series><title level="j">Scanning</title><title level="j" type="abbrev">Scanning</title><idno type="ISSN">0161-0457</idno><idno type="eISSN">1932-8745</idno><imprint><publisher>Wiley Subscription Services, Inc., A Wiley Company</publisher><pubPlace>San Francisco</pubPlace><date type="published" when="2011-05">2011-05</date><biblScope unit="volume">33</biblScope><biblScope unit="issue">3</biblScope><biblScope unit="page" from="174">174</biblScope><biblScope unit="page" to="192">192</biblScope></imprint><idno type="ISSN">0161-0457</idno></series><idno type="istex">8165BD5DD8C0272779B8783E37827F9A453DE743</idno><idno type="DOI">10.1002/sca.20244</idno><idno type="ArticleID">SCA20244</idno></biblStruct></sourceDesc><seriesStmt><idno type="ISSN">0161-0457</idno></seriesStmt></fileDesc><profileDesc><textClass><keywords scheme="KwdEn" xml:lang="en"><term>X‐ray microanalysis</term><term>X‐ray spectrum imaging</term><term>elemental analysis</term><term>elemental mapping</term><term>energy dispersive X‐ray spectrometry</term><term>scanning electron microscopy</term><term>silicon drift detector energy dispersive X‐ray spectrometer (SDD‐EDS)</term></keywords></textClass><langUsage><language ident="en">en</language></langUsage></profileDesc></teiHeader><front><div type="abstract" xml:lang="en">The high throughput of the silicon drift detector energy dispersive X‐ray spectrometer (SDD‐EDS) enables X‐ray spectrum imaging (XSI) in the scanning electron microscope to be performed in frame times of 10–100 s, the typical time needed to record a high‐quality backscattered electron (BSE) image. These short‐duration XSIs can reveal all elements, except H, He, and Li, present as major constituents, defined as 0.1 mass fraction (10 wt%) or higher, as well as minor constituents in the range 0.01–0.1 mass fraction, depending on the particular composition and possible interferences. Although BSEs have a greater abundance by a factor of 100 compared with characteristic X‐rays, the strong compositional contrast in element‐specific X‐ray maps enables XSI mapping to compete with BSE imaging to reveal compositional features. Differences in the fraction of the interaction volume sampled by the BSE and X‐ray signals lead to more delocalization of the X‐ray signal at abrupt compositional boundaries, resulting in poorer spatial resolution. Improved resolution in X‐ray elemental maps occurs for the case of a small feature composed of intermediate to high atomic number elements embedded in a matrix of lower atomic number elements. XSI imaging strongly complements BSE imaging, and the SDD‐EDS technology enables an efficient combined BSE‐XSI measurement strategy that maximizes the compositional information. If 10 s or more are available for the measurement of an area of interest, the analyst should always record the combined BSE‐XSI information to gain the advantages of both measures of compositional contrast. SCANNING 33: 174–192, 2011. © 2011 Wiley Periodicals, Inc.</div></front></TEI><affiliations><list><country><li>États-Unis</li></country><region><li>Maryland</li></region></list><tree><country name="États-Unis"><region name="Maryland"><name sortKey="Newbury, Dale E" sort="Newbury, Dale E" uniqKey="Newbury D" first="Dale E." last="Newbury">Dale E. Newbury</name></region><name sortKey="Ritchie, Nicholas W M" sort="Ritchie, Nicholas W M" uniqKey="Ritchie N" first="Nicholas W. M." last="Ritchie">Nicholas W. M. Ritchie</name></country></tree></affiliations></record>Pour manipuler ce document sous Unix (Dilib)
EXPLOR_STEP=$WICRI_ROOT/Ticri/CIDE/explor/OcrV1/Data/Main/Exploration
HfdSelect -h $EXPLOR_STEP/biblio.hfd -nk 000501 | SxmlIndent | more
Ou
HfdSelect -h $EXPLOR_AREA/Data/Main/Exploration/biblio.hfd -nk 000501 | SxmlIndent | more
Pour mettre un lien sur cette page dans le réseau Wicri
{{Explor lien
|wiki= Ticri/CIDE
|area= OcrV1
|flux= Main
|étape= Exploration
|type= RBID
|clé= ISTEX:8165BD5DD8C0272779B8783E37827F9A453DE743
|texte= Can X‐ray spectrum imaging replace backscattered electrons for compositional contrast in the scanning electron microscope?
}}
| This area was generated with Dilib version V0.6.32. |  |